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Tuesday, October 12, 2021

CONTINUITY: How Photolithography Works—Part 5: Photolithography Metrics

Photoresists (see Part 3) are highly nonlinear (or, as a photographer would say, high contrast). Getting the “dose” (or exposure) correct is critical for imaging small features, and this is a tradeoff between focus and illumination, which involves some intricate measurements and calculations.

Posted at October 12, 2021 12:46