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Sunday, October 10, 2021

CONTINUITY: How Photolithography Works—Part 4: Imaging Process

How do you make an image whose feature sizes are smaller than the wavelength of light you're using? It might seem like black magic, but it's really a matter of light magic, involving a bag of dirty tricks called “Optical Proximity Correction” (OPC), which take into account the wave properties of light and construct masks which often look nothing like the image they create, but create interference patterns which form the desired features. “Think of your semiconductor wafer as a 160 gigapixel camera image sensor.”

Posted at October 10, 2021 15:25